![](/img/cover-not-exists.png)
Low temperature deposition of crystalline AlN films by bias-enhanced Cat-CVD
Guoju Wang, Bo Wang, Anping Huang, Shilong Xu, Mankang Zhu, Biben Wang, Hui YanVolume:
58
Year:
2004
Language:
english
DOI:
10.1016/j.matlet.2004.03.018
File:
PDF, 201 KB
english, 2004