Evaluation of halogenated polyimide etching for optical...

Evaluation of halogenated polyimide etching for optical waveguide fabrication by using inductively coupled plasma

Kwansoo Han, Junghee Kim, Woo-Hyuk Jang
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Volume:
79
Year:
2001
Language:
english
Pages:
7
DOI:
10.1002/1097-4628(20010103)79:13.0.co;2-7
File:
PDF, 228 KB
english, 2001
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