Automatic detection of photoresist residual layer in...

Automatic detection of photoresist residual layer in lithography using a neural classification approach

Issam Gereige, Stéphane Robert, Jessica Eid
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Volume:
97
Year:
2012
Language:
english
DOI:
10.1016/j.mee.2012.02.032
File:
PDF, 351 KB
english, 2012
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