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A simple and novel method for the evaluation of adhesion properties between UV curable resin and stamp in UV-nanoimprint lithography (UV-NIL)
Jung-Chul Heo, Kwang-Seop Kim, Kyung-Woong KimVolume:
98
Year:
2012
Language:
english
DOI:
10.1016/j.mee.2012.05.007
File:
PDF, 793 KB
english, 2012