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A study on the comparison of CMP performance between a novel alkaline slurry and a commercial slurry for barrier removal
Chenwei Wang, Yuling Liu, Jianying Tian, Baohong Gao, Xinhuan NiuVolume:
98
Year:
2012
Language:
english
DOI:
10.1016/j.mee.2012.05.028
File:
PDF, 1.00 MB
english, 2012