Interface stability and microstructure of an ultrathin...

Interface stability and microstructure of an ultrathin α-Ta/graded Ta(N)/TaN multilayer diffusion barrier

C.H. Liu, W. Liu, Y.H. Wang, Y. Wang, Z. An, Z.X. Song, K.W. Xu
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Volume:
98
Year:
2012
Language:
english
DOI:
10.1016/j.mee.2012.05.054
File:
PDF, 949 KB
english, 2012
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