A methodology for accelerated testing by mechanical...

Microelectronics Reliability 2012 Vol. 52; Iss. 7

A methodology for accelerated testing by mechanical actuation of MEMS devices

Michael McMahon, Jeff Jones
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Volume:
52
Year:
2012
Language:
english
DOI:
10.1016/j.microrel.2012.02.007
File:
PDF, 672 KB
english, 2012
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