Influence of substrate on the growth of microcrystalline...

Materials Science in Semiconductor Processing 2012 Vol. 15; Iss. 4

Influence of substrate on the growth of microcrystalline silicon thin films deposited by plasma enhanced chemical vapor deposition

Limin Qi, Zhijuan Hu, Wang Li, Xiaomei Qin, Guoping Du, Weizhi Han, Wangzhou Shi
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Volume:
15
Year:
2012
Language:
english
DOI:
10.1016/j.mssp.2012.02.008
File:
PDF, 1.47 MB
english, 2012
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