Structural and Physical Characteristics of PECVD...

Structural and Physical Characteristics of PECVD Nanocrystalline Silicon Carbide Thin Films

J. Huran, A. Valovič, A.P. Kobzev, N.I. Balalykin, M. Kučera, Š. Haščík, Ľ. Malinovský, E. Kováčová
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.03.560
File:
PDF, 711 KB
english, 2012
Conversion to is in progress
Conversion to is failed