Structural and Physical Characteristics of PECVD Nanocrystalline Silicon Carbide Thin Films
J. Huran, A. Valovič, A.P. Kobzev, N.I. Balalykin, M. Kučera, Š. Haščík, Ľ. Malinovský, E. KováčováVolume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.03.560
File:
PDF, 711 KB
english, 2012