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On Fabrication of High Concentration Mn Doped Si by Ion Implantation: Problem and Challenge
Nianhua Peng, Christopher Jeynes, Russell M. Gwilliam, Roger P. WebbVolume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.03.577
File:
PDF, 644 KB
english, 2012