Oblique Angle Sputtering of ZnO:Ga Thin Films

Physics Procedia 2012 Vol. 32; Iss. none

Oblique Angle Sputtering of ZnO:Ga Thin Films

V. Tvarozek, I. Novotny, P. Sutta, M. Netrvalova, I. Vavra, J. Bruncko, P. Gaspierik, S. Flickyngerova
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Volume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.03.585
File:
PDF, 1.40 MB
english, 2012
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