Microstructure and Property of Self-format Graded Diffusion...

Physics Procedia 2012 Vol. 32; Iss. none

Microstructure and Property of Self-format Graded Diffusion Barrier in Cu(Zr)/ZrN Film System

Zhongxiao Song, Yanhuai Li, Guohua He, Ling Yao, Jiaan Wang, Shengwu Guo, Kewei Xu
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Volume:
32
Year:
2012
Language:
english
DOI:
10.1016/j.phpro.2012.03.613
File:
PDF, 1.03 MB
english, 2012
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