Chemical etching to dissolve dislocation cores in multicrystalline silicon
N.J. Gregori, J.D. Murphy, J.M. Sykes, P.R. WilshawVolume:
407
Year:
2012
Language:
english
DOI:
10.1016/j.physb.2011.07.049
File:
PDF, 587 KB
english, 2012