Thermal evolution of surface blistering and exfoliation due to ion-implanted hydrogen monomers into Si〈1 1 1〉
J.H. Liang, C.H. Hu, C.Y. Bai, D.S. Chao, C.M. LinVolume:
407
Year:
2012
Language:
english
DOI:
10.1016/j.physb.2011.09.005
File:
PDF, 409 KB
english, 2012