RF-MEMS switch with through-silicon via by the molten solder ejection method
Shinpei Ogawa, Shinnosuke Soda, Sang-Seok Lee, Shinichi Izuo, Yukihisa YoshidaVolume:
181
Year:
2012
Language:
english
DOI:
10.1016/j.sna.2012.04.023
File:
PDF, 891 KB
english, 2012