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Experimental study of electron mobility characterization in direct contact La-silicate/Si structure based nMOSFETs
T. Kawanago, Y. Lee, K. Kakushima, P. Ahmet, K. Tsutsui, A. Nishiyama, N. Sugii, K. Natori, T. Hattori, H. IwaiVolume:
74
Year:
2012
Language:
english
DOI:
10.1016/j.sse.2012.04.003
File:
PDF, 457 KB
english, 2012