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ALD high-k layer grating couplers for single and double slot on-chip SOI photonics
Maziar M. Naiini, Christoph Henkel, Gunnar B. Malm, Mikael ÖstlingVolume:
74
Year:
2012
Language:
english
DOI:
10.1016/j.sse.2012.04.012
File:
PDF, 822 KB
english, 2012