A novel high-power pulse PECVD method

A novel high-power pulse PECVD method

Henrik Pedersen, Petter Larsson, Asim Aijaz, Jens Jensen, Daniel Lundin
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Volume:
206
Year:
2012
Language:
english
DOI:
10.1016/j.surfcoat.2012.05.007
File:
PDF, 872 KB
english, 2012
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