Electrical properties of AlNxOy thin films prepared by...

Thin Solid Films 2012 Vol. 520; Iss. 21

Electrical properties of AlNxOy thin films prepared by reactive magnetron sputtering

J. Borges, N. Martin, N.P. Barradas, E. Alves, D. Eyidi, M.F. Beaufort, J.P. Riviere, F. Vaz, L. Marques
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Volume:
520
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.06.062
File:
PDF, 1.23 MB
english, 2012
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