Optical properties of HfO2 thin films deposited by...

Thin Solid Films 2012 Vol. 520; Iss. 22

Optical properties of HfO2 thin films deposited by magnetron sputtering: From the visible to the far-infrared

T.J. Bright, J.I. Watjen, Z.M. Zhang, C. Muratore, A.A. Voevodin
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Volume:
520
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.07.037
File:
PDF, 1.51 MB
english, 2012
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