Thermodynamic study on co-deposition of ZrB2–SiC from...

Thin Solid Films 2012 Vol. 520; Iss. 23

Thermodynamic study on co-deposition of ZrB2–SiC from ZrCl4–BCl3–CH3SiCl3–H2–Ar system

Juanli Deng, Laifei Cheng, Guopeng Zheng, Kehe Su, Litong Zhang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
520
Year:
2012
Language:
english
DOI:
10.1016/j.tsf.2012.07.105
File:
PDF, 728 KB
english, 2012
Conversion to is in progress
Conversion to is failed