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Development of applied software for analysis of gas flows in vacuum devices
Yu.A. Anikin, O.I. Dodulad, Yu.Yu. Kloss, D.V. Martynov, P.V. Shuvalov, F.G. TcheremissineVolume:
86
Year:
2012
Language:
english
DOI:
10.1016/j.vacuum.2012.02.024
File:
PDF, 688 KB
english, 2012