Effects of substrate temperature on dielectric and structural properties of Ti and Er co-doped HfO2 thin films
Murad Ali Khaskheli, Ping Wu, Xianfei Li, Hui Wang, Shiping Zhang, Sen Chen, Yili PeiVolume:
86
Year:
2012
Language:
english
DOI:
10.1016/j.vacuum.2012.03.028
File:
PDF, 691 KB
english, 2012