Substructure in the columnar crystals of the Ti0.45O0.20N0.35 oxynitride thin film
M.F. Hasaneen, D. Biro, L. Székely, P. Nemes-Incze, P.B. BarnaVolume:
86
Year:
2012
Language:
english
DOI:
10.1016/j.vacuum.2012.05.034
File:
PDF, 741 KB
english, 2012