Clustered defects in hot wire chemical vapor deposited...

Clustered defects in hot wire chemical vapor deposited poly-silicon films

J.K Rath, A Barbon, R.E.I Schropp
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Volume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(00)00028-4
File:
PDF, 155 KB
english, 2000
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