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The change of transport mechanism in μc-Si:H films induced by H2-diluted silane plasma
Shaoyun Huang, Li Wang, Gautam Ganguly, Jun Xu, Xinfan Huang, Akihisa Matsuda, Kunji ChenVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(00)00045-4
File:
PDF, 145 KB
english, 2000