Effects of ArF excimer irradiation on single energy and multi energy Ge ion implanted silica
R.H. Magruder III, R.A. Weller, R.A. Weeks, J. Wehrmeyer, R.A. Zuhr, D.K. HensleyVolume:
280
Year:
2001
Language:
english
DOI:
10.1016/s0022-3093(00)00372-0
File:
PDF, 131 KB
english, 2001