![](/img/cover-not-exists.png)
The characterization of amorphous carbon nitride films grown by RFCVD method
Sheng-Yuan Chen, Juh-Tzeng LueVolume:
283
Year:
2001
Language:
english
DOI:
10.1016/s0022-3093(01)00354-4
File:
PDF, 172 KB
english, 2001