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Instability evolution within a-SiNx film assessed through MIS structure under bias and temperature stresses
Orhan Özdemir, İsmail Atılgan, Bayram KatırcıoğluVolume:
296
Year:
2001
Language:
english
DOI:
10.1016/s0022-3093(01)00892-4
File:
PDF, 229 KB
english, 2001