EPR spectra of amorphous silicon nitride films grown by...

Journal of Non-Crystalline Solids 2002 Vol. 297; Iss. 2-3

EPR spectra of amorphous silicon nitride films grown by low-temperature PECVD

L.D Bogomolova, V.A Jachkin, S.A Prushinsky, D Stryahilev, A Sazonov, A Nathan
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Volume:
297
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(01)00934-6
File:
PDF, 213 KB
english, 2002
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