FTIR phase-modulated ellipsometry measurements of...

Journal of Non-Crystalline Solids 2002 Vol. 299-302; Iss. part-P1

FTIR phase-modulated ellipsometry measurements of microcrystalline silicon films deposited by hot-wire CVD

E Garcia-Caurel, C Niikura, S.Y Kim, B Drévillon, J.E Bourée
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Volume:
299-302
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(01)00950-4
File:
PDF, 177 KB
english, 2002
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