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Excimer laser recrystallization of selectively floating a-Si thin film
Cheon-Hong Kim, In-Hyuk Song, Woo-Jin Nam, Min-Koo HanVolume:
299-302
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(01)00977-2
File:
PDF, 468 KB
english, 2002