Pulsed laser crystallization of amorphous silicon for polysilicon flat panel imagers
J.B. Boyce, J.P. Lu, J. Ho, R.A. Street, K. van Schuylenbergh, Y. WangVolume:
299-302
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(01)01106-1
File:
PDF, 255 KB
english, 2002