The effect of substrate temperature on HW-CVD deposited...

Journal of Non-Crystalline Solids 2002 Vol. 299-302; Iss. part-P1

The effect of substrate temperature on HW-CVD deposited a-SiGe:H films

S.R. Jadkar, Jaydeep V. Sali, S.T. Kshirsagar, M.G. Takwale
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Volume:
299-302
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(01)01158-9
File:
PDF, 128 KB
english, 2002
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