Highly conductive boron-doped nanocrystalline silicon-carbide film prepared by low-hydrogen-dilution photo-CVD method using ethylene as a carbon source
Seung Yeop Myong, Hyung Kew Lee, Euisik Yoon, Koeng Su LimVolume:
298
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(02)00916-x
File:
PDF, 245 KB
english, 2002