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The structural transformation and properties of spin-on poly(silsesquioxane) films by thermal curing
Wei-Chih Liu, Chang-Chung Yang, Wen-Chang Chen, Bao-Tong Dai, Ming-Shih TsaiVolume:
311
Year:
2002
Language:
english
DOI:
10.1016/s0022-3093(02)01373-x
File:
PDF, 536 KB
english, 2002