Structural and electrical properties of Ta2O5 thin films...

Journal of Non-Crystalline Solids 2003 Vol. 322; Iss. 1-3

Structural and electrical properties of Ta2O5 thin films deposited on Si(1 0 0) from Ta(OC2H5)5 precursor

Florence Jolly, Maurizio Passacantando, Vicenzo Salerni, Luca Lozzi, Pietro Picozzi, Sandro Santucci
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Volume:
322
Year:
2003
Language:
english
DOI:
10.1016/s0022-3093(03)00207-2
File:
PDF, 159 KB
english, 2003
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