Influence of UV irradiation on a-Si:H film growth

Influence of UV irradiation on a-Si:H film growth

Svetoslav Koynov, Atanaska Toneva, Cyril Koughia
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Volume:
137-138
Year:
1991
Language:
english
DOI:
10.1016/s0022-3093(05)80213-3
File:
PDF, 233 KB
english, 1991
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