Real time spectroscopic ellipsometry determination of the...

Real time spectroscopic ellipsometry determination of the evolution of amorphous semiconductor optical functions, bandgap, and microstructure

Y.M. Li, Ilsin An, H.V. Nguyen, C.R. Wronski, R.W. Collins
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Volume:
137-138
Year:
1991
Language:
english
DOI:
10.1016/s0022-3093(05)80238-8
File:
PDF, 305 KB
english, 1991
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