Real time spectroscopic ellipsometry determination of the evolution of amorphous semiconductor optical functions, bandgap, and microstructure
Y.M. Li, Ilsin An, H.V. Nguyen, C.R. Wronski, R.W. CollinsVolume:
137-138
Year:
1991
Language:
english
DOI:
10.1016/s0022-3093(05)80238-8
File:
PDF, 305 KB
english, 1991