Synthesis and properties of tantalum oxide films prepared by the sol-gel method using photo-irradiation
T. Ohishi, S. Maekawa, A. KatohVolume:
147-148
Year:
1992
Language:
english
DOI:
10.1016/s0022-3093(05)80665-9
File:
PDF, 488 KB
english, 1992