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Decrease of silicon defects in oxynitride glass
Masaaki Oota, Takeshi Kanamori, Satoshi Kitamura, Hiroyuki Fujii, Takashi Kawasaki, Keiji Sekine, Chiaki ManabeVolume:
209
Year:
1997
Language:
english
DOI:
10.1016/s0022-3093(96)00546-7
File:
PDF, 472 KB
english, 1997