Influence of rapid thermal annealing processes on the...

Influence of rapid thermal annealing processes on the properties of SiNx:H films deposited by the electron cyclotron resonance method

F.L Martı́nez, I Mártil, G González-Dı́az, B Selle, I Sieber
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Volume:
227-230
Year:
1998
Language:
english
DOI:
10.1016/s0022-3093(98)00092-1
File:
PDF, 87 KB
english, 1998
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