Low temperature growth of highly crystallized silicon thin...

Low temperature growth of highly crystallized silicon thin films using hydrogen and argon dilution

S Hamma, P Roca i Cabarrocas
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
227-230
Year:
1998
Language:
english
DOI:
10.1016/s0022-3093(98)00342-1
File:
PDF, 142 KB
english, 1998
Conversion to is in progress
Conversion to is failed