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Molecular orbital theory examination into improved gate oxide integrity through the incorporation of nitrogen and fluorine
Takuya Maruizumi, Jiro Ushio, Masanobu MiyaoVolume:
246
Year:
1999
Language:
english
DOI:
10.1016/s0022-3093(99)00021-6
File:
PDF, 348 KB
english, 1999