Plasma enhanced chemical vapor deposition of amorphous,...

Plasma enhanced chemical vapor deposition of amorphous, polymorphous and microcrystalline silicon films

P Roca i Cabarrocas
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Volume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00714-0
File:
PDF, 186 KB
english, 2000
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