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Evolutionary phase diagrams for the deposition of silicon films from hydrogen-diluted silane
Joohyun Koh, A.S. Ferlauto, P.I. Rovira, R.J. Koval, C.R. Wronski, R.W. CollinsVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00716-4
File:
PDF, 146 KB
english, 2000