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Changes of hydrogen evolution thermodynamics induced by He and H2 dilution in PECVD a-Si:H films: influence on thermal crystallization
P delli Veneri, C Privato, E TerziniVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00757-7
File:
PDF, 136 KB
english, 2000