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Microstructure and surface roughness of microcrystalline silicon prepared by very high frequency-glow discharge using hydrogen dilution
E Vallat-Sauvain, U Kroll, J Meier, N Wyrsch, A ShahVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00769-3
File:
PDF, 899 KB
english, 2000