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Structural, optical and electronic properties of hydrogenated polymorphous silicon films deposited at 150°C
R Butté, S Vignoli, M Meaudre, R Meaudre, O Marty, L Saviot, P Roca i CabarrocasVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00833-9
File:
PDF, 200 KB
english, 2000