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Simple fabrication of offset-gated poly-Si TFTs by in situ fluorine passivation and excimer-laser doping
Cheon-Hong Kim, Sang-Hoon Jung, Juhn-Suk Yoo, Min-Koo HanVolume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00939-4
File:
PDF, 181 KB
english, 2000